微機電與感測器的全球商機及技術革新

The influence of the CASIMIR Force on MEMS and NEMS



Miniature mechanical/electromechanical systems are becoming increasingly useful in many applications. With the decrease in device dimensions additional forces on Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) have to be considered that are normally neglected in macro-systems. The Casimir Effect is the cause of one such force. For example one of the principal causes of malfunctioning in MEMS is stiction, namely, the collapse of movable elements into nearby surfaces, resulting in their permanent adhesion. This can occur during fabrication, especially due to capillary forces, or during operation. The Casimir effect is potentially an important underlying mechanism causing this phenomenon. The problem is technologically important, because it adversely affects the production yield on batch fabricated devices, and also plagues many devices in operation.


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如一平行電容板

當兩平行板間之距離間隔縮小到一定的量之後

就會有CASIMIR FORCE的產生

此力是由零點能量(zero point energy)產生的

為什麼零點能量會產生,那就請大家去看量子力學了

FROM HERE

http://www.casimir.rl.ac.uk/default.htm

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