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Magnetic MEMS switching regulator



United States Patent 7,839,242
Hopper , et al. November 23, 2010
Magnetic MEMS switching regulator

Abstract

A MEMS magnetic flux switch is fabricated as a ferromagnetic core. The core includes a center cantilever that is fabricated as a free beam that can oscillate at a resonant frequency that is determined by its mechanical and material properties. The center cantilever is moved by impulses applied by an associated motion oscillator, which can be magnetic or electric actuators.

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