Title: Method and apparatus for MEMS oscillator
US. Patent: 7,863,697
US. Patent: 7,863,697
Assignee: Miradia Inc.
Abstract: A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
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