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Wet Chemical Etching of Metals and Semiconductors

Wet Chemical Etching of Metals and Semiconductors

A comprehensive list of etchants for over 50 different metals, semiconductors and cleanroom materials. Some etch rates are given. The ratios are volume ratios unless other units are specified.

不錯的網頁

可以得知各式金屬的蝕刻液參數及配方

FROM HERE

http://www.ee.byu.edu/cleanroom/wet_etch.phtml

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