微機電與感測器的全球商機及技術革新

Evaluation of MEMS Accelerometer Sensor for Earthquake Observations


Abstract
Technology for imaging the lithospheric structure using earthquakes, such as receiver functions
and seismic interferometry, have advanced greatly in the last decade. Three component, low
cost accelerometer sensors have been constructed using Micro Electro Mechanical System (MEMS)technology, and are providing new opportunities for earthquake observations. To evaluate the feasibilityof MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS sensors in Mizusawa district, northern Honshu, Japan, for three months in 2007. In comparison with observed seismograms of velocity sensors, MEMS sensors show high performance for local and regional earthquakes. However, due to high-noise levels from the sensor itself at lower frequencies, MEMS sensors are not adequate for recording teleseismic waves.

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[VIA PAPER]

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