ABSTRACT
This paper reports for the first time a novel technique of nanoscale localized stress-introducing achieved by focused ion beam. The technique can be used to fabricate three-dimensional (3D) nanohelixes and implement 3D nanometer assemblies with the advantages of high flexibility, controllability and repeatability. Using the technique, 3D nanohelixes in both fixed-free and fixed-fixed forms with different structure parameters are successfully fabricated. In addition, a 3D cubic frame with 600-nm-wide beams is successfully assembled from two-dimensional patterns.
This paper reports for the first time a novel technique of nanoscale localized stress-introducing achieved by focused ion beam. The technique can be used to fabricate three-dimensional (3D) nanohelixes and implement 3D nanometer assemblies with the advantages of high flexibility, controllability and repeatability. Using the technique, 3D nanohelixes in both fixed-free and fixed-fixed forms with different structure parameters are successfully fabricated. In addition, a 3D cubic frame with 600-nm-wide beams is successfully assembled from two-dimensional patterns.
利用Focused Ion Beam(FIB)的技術來達成自組裝或是完成3D結構。此方法是用FIB打在材料表面，破壞材料表面，而使的材料表面產生變形進而造成出平面彎曲，在此論文中用此技術製作出了奈米螺旋管，也可用來製作奈米探針。
FROM HERE
Ling Xia, Wengang Wu, Jun Xu, Yilong Hao, and Yangyuan Wang, "3D NANOHELIX FABRICATION AND 3D NANOMETER ASSEMBLY BY FOCUSED ION BEAM STRESS-INTRODUCING TECHNIQUE", MEMS 2006, Istabui, Turkey, Jan. 2006.
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