發表文章

微機電與感測器的全球商機及技術革新

High-Capacitance-Ratio Warped-Beam Capacitive MEMS Switch Designs

Ultraminiaturized High-Speed Permanent-Magnet Generators for Milliwatt-Level Power Generation 米厘瓦等級的微型發電機

Dramatic enhancement in energy harvesting for a narrow range of dimensions in piezoelectric nanostructures

A MEMS-based variable micro-lens system

Multidirectional UV Lithography for Complex 3-D MEMS Structures

Double-sided MEMS mirror for L-switching Matrix

Design and Analysis of a Novel Low Actuation Voltage Capacitive RF MEMS Switches

Linear and Non Linear Behavior of Mechanical Resonators for Optimized Inertial Electromagnetic Microgenerators

DUAL-AXIS ELECTROMAGNETIC SCANNING MICROMIRRORUSING RADIAL MAGNETIC FIELD

3D NANOHELIX FABRICATION AND 3D NANOMETER ASSEMBLY BY FOCUSED ION BEAM STRESS-INTRODUCING TECHNIQUE

Magnetic Induction Micromachine—Part II:Fabrication and Testing

Glass Blowing on a Wafer Level