ABSTRACT
This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than using the magnetic field oriented 45° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation[1,2]. Forced actuation of the gimbal and resonant actuation of the micromirror provide slow vertical scan and fast horizontal scan respectively. A dual-axis scanner with maximum scan angle of 16.1°, mirror size of 1.5mm in diameter, and resonant frequency of 19.7kHz is reported.
This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than using the magnetic field oriented 45° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation[1,2]. Forced actuation of the gimbal and resonant actuation of the micromirror provide slow vertical scan and fast horizontal scan respectively. A dual-axis scanner with maximum scan angle of 16.1°, mirror size of 1.5mm in diameter, and resonant frequency of 19.7kHz is reported.
利用放射式電場來致動的電磁式微掃描面鏡，使用SOI晶圓做為面鏡結構並配電鑄銅技術來做為磁場感應。當電流通過面鏡時，由於可通過兩組訊號，因此可以達到雙軸致動方式。
FROM HERE
Chang-Hyeon Ji, Si-Hong Ahn, Ki-Chang Song, Hyoung-Kil Yoon, Moongoo Choi, Sang-Cheon Kim, and Jong-Uk Bu, "DUAL-AXIS ELECTROMAGNETIC SCANNING MICROMIRRORUSING RADIAL MAGNETIC FIELD", MEMS 2006, Istabui, Turkey, Jan. 2006.
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