使用微機電製作的可變微透鏡系統
Abstract
We present a tunable liquid micro-lens system exhibiting a tuning range of back focal length between 2.3 mm and infinity achieved by applying a voltage of 0–45 V. The lens actuation mechanism is based on electro-wetting on dielectrics (EWOD) and the system is fabricated in MEMS technology. In this system, two density-matched optical fluids are located in a centring structure which was defined by an anisotropic etching process. The system design provides an initial back focal length of a few millimetres and is robust against shocks and vibrations.
本篇是利用EWDO所製作的微透鏡，而EWOD，是Lippman在1875年所發現的理論。在本篇中提到了其它液體透鏡製作的方法，包括了a.利用光阻溶融技術及b.使用玻璃基底結構加上去水性表面，但是這些都有缺點，包括了液體與密度必須完美的搭配結構和重力決定了尺寸，所以才有本此的結構產產生。
FROM HERE
F Krogmann,WM¨onch and H Zappe, "AMEMS-based variable micro-lens system", JOURNAL OF OPTICS A: PURE AND APPLIED OPTICS, J. Opt. A: Pure Appl. Opt. 8 (2006) S330–S336.
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